Both Vacuum Pump and Compressor are devices for processing gas, but their working principles and scope of application are different.
The main function of the vacuum pump is to remove the gas from the reaction chamber to reduce the pressure in the container to achieve a predetermined vacuum degree. The gas is extracted from the space through the suction and exhaust mechanism to form a vacuum state. Vacuum pumps are usually used in laboratories, production and manufacturing fields. In wafer fabs, etching equipment, deposition equipment, EUV lithography equipment, ion implantation equipment, detection and characterization equipment, etc. all need to be vacuumed.
The function of the compressor is to inhale gas and compress it, increase the pressure of the gas, compress the gas into a smaller volume, and increase the density and pressure of the gas. Its working principle is to compress the gas through the exhaust valve, and then put the compressed gas into a gas tank or other equipment. Compressors are usually used in processing and manufacturing fields. The CDA gas we often talk about is provided by the compressor. CDA is used to control various automation equipment and valves. For semiconductor manufacturing, CDA must be very pure and dry. The air output by the compressor needs to pass through a sophisticated filtration system to remove oil, moisture and other particles to ensure that there is no contamination of the wafer.
What are the categories of Vacuum Pump and Compressor?
In semiconductor equipment, dry pumps and molecular pumps are commonly used. A dry pump refers to a vacuum pump that does not use any liquid as a sealing or cooling medium, avoiding the problem of oil vapor contamination. It is generally used for the rough vacuum extraction of semiconductor equipment. Molecular pumps can achieve extremely high vacuum levels. Dry pumps and molecular pumps are often used in combination in semiconductor equipment to meet the needs of different vacuum levels.
Compressors can be divided into piston, screw, centrifugal, rotary vane air compressors, etc.
Due to the different designs and working principles of Vacuum Pump and Compressor, vacuum pumps cannot usually replace compressors. Although vacuum pumps can reduce the pressure and density of gases, they cannot compress gases into smaller volumes and higher pressures. In addition, due to the limited performance and working characteristics of vacuum pumps, they are best suited to handling low-density gases and low-pressure environments.
Therefore, if gas needs to be compressed into a smaller volume and higher pressure, a compressor should be used. On the contrary, if the gas needs to be extracted and a vacuum state is formed, a vacuum pump should be used.
Although both Vacuum Pump and Compressor are devices used to process gas, there are great differences in design and working principle. Although the vacuum pump can reduce the pressure and density of the gas, it cannot replace the compressor, especially when the gas needs to be compressed into a smaller volume and higher pressure.
